Keiichi Ohtsuka

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Chiba, JP

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Patents Grantslast 30 patents

Information Patent Grant
Chemical vapor deposition process for depositing tungsten
- Patent number 6,156,382
- Issue date Dec 5, 2000
- Applied Materials, Inc.
- Ravi Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...