Keiichi Sugahara

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Hyogo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus capable of evaluating process performance
- Patent number 6,929,712
- Issue date Aug 16, 2005
- Renesas Technology Corp.
- Minoru Hanazaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Controller for plasma processing apparatus performing good etching...
- Publication number 20040003896
- Publication date Jan 8, 2004
- Mitsubishi Denki Kabushiki Kaisha
- Keiichi Sugahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus capable of evaluating process performance
- Publication number 20030178140
- Publication date Sep 25, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Minoru Hanazaki
- H01 - BASIC ELECTRIC ELEMENTS