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Keiichi Takemoto
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Nagano, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Electrostatic chuck and substrate fixing device
Patent number
12,230,527
Issue date
Feb 18, 2025
Shinko Electric Industries Co., Ltd.
Yusuke Muramatsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Base plate and substrate fixing device
Patent number
12,080,583
Issue date
Sep 3, 2024
Shinko Electric Industries Co., Ltd.
Ken Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck and substrate fixing device
Patent number
11,909,335
Issue date
Feb 20, 2024
Shinko Electric Industries Co., Ltd.
Takashi Onuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate fixing device, electrostatic chuck, and method of manufac...
Patent number
11,830,752
Issue date
Nov 28, 2023
Shinko Electric Industries Co., Ltd.
Yoichi Harayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate fixing device, electrostatic chuck and electrostatic chuc...
Patent number
11,699,612
Issue date
Jul 11, 2023
Shinko Electric Industries Co., Ltd.
Keiichi Takemoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate fixing device
Patent number
11,631,598
Issue date
Apr 18, 2023
Shinko Electric Industries Co., Ltd.
Nobuyuki Iijima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate fixing device
Patent number
10,535,545
Issue date
Jan 14, 2020
Shinko Electric Industries Co., Ltd.
Yoichi Harayama
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate holding apparatus
Patent number
10,361,110
Issue date
Jul 23, 2019
Shinko Electric Industries Co., Ltd.
Keiichi Takemoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing wiring substrate
Patent number
7,276,438
Issue date
Oct 2, 2007
Shinko Electric Industries Co., Ltd.
Yasuyoshi Horikawa
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
BASE PLATE AND SUBSTRATE FIXING DEVICE
Publication number
20230057110
Publication date
Feb 23, 2023
Shinko Electric Industries Co., Ltd.
Ken Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK AND SUBSTRATE FIXING DEVICE
Publication number
20220310434
Publication date
Sep 29, 2022
Shinko Electric Industries Co., Ltd.
Yusuke Muramatsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK AND SUBSTRATE FIXING DEVICE
Publication number
20220208593
Publication date
Jun 30, 2022
Shinko Electric Industries Co., Ltd.
Yusuke Muramatsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK AND SUBSTRATE FIXING DEVICE
Publication number
20220190749
Publication date
Jun 16, 2022
Shinko Electric Industries Co., Ltd.
Takashi Onuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE FIXING DEVICE, ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUC...
Publication number
20220157636
Publication date
May 19, 2022
Shinko Electric Industries Co., Ltd.
Keiichi Takemoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE FIXING DEVICE, ELECTROSTATIC CHUCK, AND METHOD OF MANUFAC...
Publication number
20210391203
Publication date
Dec 16, 2021
Shinko Electric Industries Co., Ltd.
Yoichi Harayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE FIXING DEVICE
Publication number
20200176282
Publication date
Jun 4, 2020
Shinko Electric Industries Co., Ltd.
Nobuyuki IIJIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HOLDING APPARATUS
Publication number
20180047604
Publication date
Feb 15, 2018
Shinko Electric Industries Co., Ltd.
Keiichi TAKEMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE FIXING DEVICE
Publication number
20180040497
Publication date
Feb 8, 2018
Shinko Electric Industries Co., Ltd.
Yoichi HARAYAMA
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
Method of manufacturing wiring substrate
Publication number
20050277282
Publication date
Dec 15, 2005
Shinko Electric Industries Co., Ltd.
Yasuyoshi Horikawa
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR