Keiichi Tanaka

Person

Nirasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method, substrate processing apparatus, and st...
- Patent number 11,693,319
- Issue date Jul 4, 2023
- Tokyo Electron Limited
- Keiichi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 11,520,233
- Issue date Dec 6, 2022
- Tokyo Electron Limited
- Keiichi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method
- Patent number 11,410,834
- Issue date Aug 9, 2022
- Tokyo Electron Limited
- Keiichi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 11,402,758
- Issue date Aug 2, 2022
- Tokyo Electron Limited
- Keiichi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 10,606,177
- Issue date Mar 31, 2020
- Tokyo Electron Limited
- Tomohiro Iseki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and recording medium
- Patent number 10,002,754
- Issue date Jun 19, 2018
- Tokyo Electron Limited
- Keiichi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, substrate processing apparatus and non...
- Patent number 9,627,232
- Issue date Apr 18, 2017
- Tokyo Electron Limited
- Keiichi Tanaka
- B08 - CLEANING
Information Patent Grant
Substrate processing method, substrate processing apparatus, and st...
- Patent number 9,552,987
- Issue date Jan 24, 2017
- Tokyo Electron Limited
- Yuichiro Miyata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vacuum processing apparatus and vacuum processing method
- Patent number 9,349,589
- Issue date May 24, 2016
- Tokyo Electron Limited
- Tadashi Enomoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate cleaning method, substrate cleaning apparatus and storage...
- Patent number 9,307,653
- Issue date Apr 5, 2016
- Tokyo Electron Limited
- Kousuke Yoshihara
- B08 - CLEANING
Information Patent Grant
Method of depositing a film and film deposition apparatus
- Patent number 9,153,433
- Issue date Oct 6, 2015
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method, computer-readable storage medium and s...
- Patent number 8,420,303
- Issue date Apr 16, 2013
- Tokyo Electron Limited
- Yoshiaki Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Non-transitory storage medium for rinsing or developing sequence
- Patent number 8,398,320
- Issue date Mar 19, 2013
- Tokyo Electron Limited
- Yasuhiro Takaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sealing structure of vacuum device
- Patent number 8,021,488
- Issue date Sep 20, 2011
- Tokyo Electron Limited
- Keiichi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rinse treatment method and development process method
- Patent number 7,968,278
- Issue date Jun 28, 2011
- Tokyo Electron Limited
- Yasuhiro Takaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing device, substrate processing method, and devel...
- Patent number 7,387,455
- Issue date Jun 17, 2008
- Tokyo Electron Limited
- Tetsutoshi Awamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for developing processing and apparatus for supplying develo...
- Patent number 6,991,385
- Issue date Jan 31, 2006
- Tokyo Electron Limited
- Kousuke Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for developing processing and apparatus for supplying develo...
- Patent number 6,811,962
- Issue date Nov 2, 2004
- Tokyo Electron Limited
- Kousuke Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process system with transfer unit for object to be processed
- Patent number 6,395,094
- Issue date May 28, 2002
- Tokyo Electron Limited
- Keiichi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Auxiliary vacuum chamber and vacuum processing unit using same
- Patent number 6,234,107
- Issue date May 22, 2001
- Tokyo Electron Limited
- Keiichi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
- Publication number 20220113628
- Publication date Apr 14, 2022
- TOKYO ELECTRON LIMITED
- Keiichi TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20210280394
- Publication date Sep 9, 2021
- TOKYO ELECTRON LIMITED
- Keiichi TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20210063882
- Publication date Mar 4, 2021
- TOKYO ELECTRON LIMITED
- Keiichi TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20210063883
- Publication date Mar 4, 2021
- TOKYO ELECTRON LIMITED
- Keiichi TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20190035698
- Publication date Jan 31, 2019
- TOKYO ELECTRON LIMITED
- Keiichi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Substrate Processing Method, and St...
- Publication number 20190025704
- Publication date Jan 24, 2019
- TOKYO ELECTRON LIMITED
- Tomohiro ISEKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL CONTAMINATION PREVENTING METHOD AND APPARATUS AND SUBSTRATE P...
- Publication number 20170252782
- Publication date Sep 7, 2017
- TOKYO ELECTRON LIMITED
- Satoru KOIKE
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND RECORDING MEDIUM
- Publication number 20170004993
- Publication date Jan 5, 2017
- TOKYO ELECTRON LIMITED
- Keiichi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS AND VACUUM PROCESSING METHOD
- Publication number 20150203965
- Publication date Jul 23, 2015
- TOKYO ELECTRON LIMITED
- Tadashi ENOMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
- Publication number 20140363976
- Publication date Dec 11, 2014
- TOKYO ELECTRON LIMITED
- Yuichiro MIYATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND NON...
- Publication number 20140299161
- Publication date Oct 9, 2014
- TOKYO ELECTRON LIMITED
- Keiichi TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DEPOSITING A FILM AND FILM DEPOSITION APPARATUS
- Publication number 20140113436
- Publication date Apr 24, 2014
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS AND STORAGE...
- Publication number 20130174873
- Publication date Jul 11, 2013
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- B08 - CLEANING
Information Patent Application
RINSING METHOD AND DEVELOPING METHOD
- Publication number 20110229120
- Publication date Sep 22, 2011
- TOKYO ELECTRON LIMITED
- Yasuhiro TAKAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD, COMPUTER-READABLE STORAGE MEDIUM AND S...
- Publication number 20110143289
- Publication date Jun 16, 2011
- TOKYO ELECTRON LIMITED
- Yoshiaki YAMADA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING TREATMENT METHOD AND COMPUTER-READABLE STORAGE MEDIUM
- Publication number 20110143290
- Publication date Jun 16, 2011
- TOKYO ELECTRON LIMITED
- Keiichi TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Rinse Treatment Method and Development Process Method
- Publication number 20080274433
- Publication date Nov 6, 2008
- TOKYO ELECTRON LIMITED
- Yasuhiro Takaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing device, substrate processing method, and devel...
- Publication number 20050223980
- Publication date Oct 13, 2005
- TOKYO ELECTRON LIMITED
- Tetsutoshi Awamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for developing processing and apparatus for supplying develo...
- Publication number 20050053874
- Publication date Mar 10, 2005
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for developing processing and apparatus for supplying develo...
- Publication number 20030044731
- Publication date Mar 6, 2003
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS

Keiichi Tanaka

Person

Patents Grantslast 30 patents

Substrate processing method, substrate processing apparatus, and st...

Substrate processing apparatus, substrate processing method, and st...

Substrate processing method

Substrate processing apparatus, substrate processing method, and st...

Substrate processing apparatus, substrate processing method, and st...

Substrate processing method and recording medium

Substrate processing method, substrate processing apparatus and non...

Substrate processing method, substrate processing apparatus, and st...

Vacuum processing apparatus and vacuum processing method

Substrate cleaning method, substrate cleaning apparatus and storage...

Method of depositing a film and film deposition apparatus

Substrate processing method, computer-readable storage medium and s...

Non-transitory storage medium for rinsing or developing sequence

Sealing structure of vacuum device

Rinse treatment method and development process method

Substrate processing device, substrate processing method, and devel...

Method for developing processing and apparatus for supplying develo...

Method for developing processing and apparatus for supplying develo...

Process system with transfer unit for object to be processed

Auxiliary vacuum chamber and vacuum processing unit using same

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

PROCESSING APPARATUS AND PROCESSING METHOD

Substrate Processing Apparatus, Substrate Processing Method, and St...

METAL CONTAMINATION PREVENTING METHOD AND APPARATUS AND SUBSTRATE P...

SUBSTRATE PROCESSING METHOD AND RECORDING MEDIUM

VACUUM PROCESSING APPARATUS AND VACUUM PROCESSING METHOD

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND NON...

METHOD OF DEPOSITING A FILM AND FILM DEPOSITION APPARATUS

SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS AND STORAGE...

RINSING METHOD AND DEVELOPING METHOD

SUBSTRATE PROCESSING METHOD, COMPUTER-READABLE STORAGE MEDIUM AND S...

DEVELOPING TREATMENT METHOD AND COMPUTER-READABLE STORAGE MEDIUM

Rinse Treatment Method and Development Process Method

Substrate processing device, substrate processing method, and devel...

Method for developing processing and apparatus for supplying develo...

Method for developing processing and apparatus for supplying develo...