Keiichi Yahata

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 10,593,571
- Issue date Mar 17, 2020
- Tokyo Electron Limited
- Hiroaki Inadomi
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS M...
- Publication number 20240242978
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Shota UMEZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170287742
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Hiroaki Inadomi
- B08 - CLEANING