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Keiichi Yokota
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Nirasaki, JP
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last 30 patents
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Patent Grant
Probe apparatus for measuring electrical characteristics of objects
Patent number
5,416,592
Issue date
May 16, 1995
Tokyo Electron Kabushiki Kaisha
Shigeoki Mori
G01 - MEASURING TESTING
Information
Patent Grant
Probe card
Patent number
5,412,329
Issue date
May 2, 1995
Tokyo Electron Yamanashi Limited
Shinji Iino
G01 - MEASURING TESTING
Information
Patent Grant
Probe apparatus with a swinging holder for an object of examination
Patent number
5,404,111
Issue date
Apr 4, 1995
Tokyo Electron Limited
Shigeoki Mori
G01 - MEASURING TESTING
Information
Patent Grant
Method of positioning objects to be measured
Patent number
4,966,520
Issue date
Oct 30, 1990
Tokyo Electron Limited
Keiichi Yokota
G01 - MEASURING TESTING
Information
Patent Grant
Automatic wafer position aligning method for wafer prober
Patent number
4,943,767
Issue date
Jul 24, 1990
Tokyo Electron Limited
Keiichi Yokota
G01 - MEASURING TESTING