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Keiichiro Hitomi
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Delmar, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Pattern dimension measurement method and charged particle beam micr...
Patent number
9,200,896
Issue date
Dec 1, 2015
Hitachi High-Technologies Corporation
Keiichiro Hitomi
G01 - MEASURING TESTING
Information
Patent Grant
Scanning electron microscope
Patent number
9,110,384
Issue date
Aug 18, 2015
Hitachi High-Technologies Corporation
Seiko Omori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scanning electron microscope and inspection method using same
Patent number
8,637,820
Issue date
Jan 28, 2014
Hitachi High-Technologies Corporation
Yasunari Sohda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged beam device
Patent number
8,478,021
Issue date
Jul 2, 2013
Hitachi High-Technologies Corporation
Kaori Shirahata
G01 - MEASURING TESTING
Information
Patent Grant
Standard member for correction, scanning electron microscope using...
Patent number
8,263,929
Issue date
Sep 11, 2012
Hitachi High-Technologies Corporation
Yoshinori Nakayama
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
SCANNING ELECTRON MICROSCOPE
Publication number
20120298865
Publication date
Nov 29, 2012
Seiko Omori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SCANNING ELECTRON MICROSCOPE AND INSPECTION METHOD USING SAME
Publication number
20120286158
Publication date
Nov 15, 2012
Yasunari Sohda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERN DIMENSION MEASUREMENT METHOD AND CHARGED PARTICLE BEAM MICR...
Publication number
20120212602
Publication date
Aug 23, 2012
Keiichiro Hitomi
G01 - MEASURING TESTING
Information
Patent Application
CHARGED BEAM DEVICE
Publication number
20110274341
Publication date
Nov 10, 2011
Hitachi High-Technologies Corporation
Kaori Shirahata
G01 - MEASURING TESTING
Information
Patent Application
MEASURING METHOD OF PATTERN DIMENSION AND SCANNING ELECTRON MICROSC...
Publication number
20110208477
Publication date
Aug 25, 2011
Keiichiro Hitomi
G01 - MEASURING TESTING
Information
Patent Application
Standard Member for Correction, Scanning Electron Microscope Using...
Publication number
20110133065
Publication date
Jun 9, 2011
Hitachi High-Technologies Corporation
Yoshinori Nakayama
B82 - NANO-TECHNOLOGY