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Keiichiro Tsutsumi
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Room temperature bonding apparatus and room temperature bonding method
Patent number
9,580,306
Issue date
Feb 28, 2017
MITSUBISHI HEAVY INDUSTRIES MACHINE TOOL CO., LTD.
Masato Kinouchi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
ROOM-TEMPERATURE BONDED DEVICE, WAFER HAVING ROOM-TEMPERATURE BONDE...
Publication number
20150294900
Publication date
Oct 15, 2015
Mitsubishi Heavy Industries, Ltd.
Takayuki Goto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ROOM TEMPERATURE BONDING APPARATUS AND ROOM TEMPERATURE BONDING METHOD
Publication number
20150251904
Publication date
Sep 10, 2015
Mitsubishi Heavy Industries, Ltd.
Masato Kinouchi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BONDING METHOD, BONDING APPARATUS, AND BONDING SYSTEM
Publication number
20120247645
Publication date
Oct 4, 2012
MITSUBISHI HEAVY INDUSTIRIES, LTD.
Keiichiro Tsutsumi
H01 - BASIC ELECTRIC ELEMENTS