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Keiichiro URABE
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Ibaraki, JP
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last 30 patents
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Patent Grant
Chemistries for etching multi-stacked layers
Patent number
11,075,084
Issue date
Jul 27, 2021
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Peng Shen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD OF ETCHING POROUS FILM
Publication number
20200395221
Publication date
Dec 17, 2020
TOKYO ELECTRON LIMITED
Shigeru TAHARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POROUS FILM SEALING METHOD AND POROUS FILM SEALING MATERIAL
Publication number
20200010630
Publication date
Jan 9, 2020
L'Air Liquide, Société Anonyme pour I'Etude et I'xpoloitation des Procédés Ge...
Keiichiro URABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHEMISTRIES FOR ETCHING MULTI-STACKED LAYERS
Publication number
20170365487
Publication date
Dec 21, 2017
L'Air Liquide, Société Anonyme pour l'Etude et I'Exploitation des Procédés Ge...
Peng SHEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...