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Keiji Fujimoto
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Hiroshima, JP
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Patents Grants
last 30 patents
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Patent Grant
Device and method for detecting position of semiconductor substrate
Patent number
9,275,886
Issue date
Mar 1, 2016
Rorze Corporation
Keiji Fujimoto
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
DEVICE AND METHOD FOR DETECTING POSITION OF SEMICONDUCTOR SUBSTRATE
Publication number
20150287625
Publication date
Oct 8, 2015
Rorze Corporation
Keiji Fujimoto
G01 - MEASURING TESTING