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Keiji Isamoto
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Aichi, JP
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Patents Grants
last 30 patents
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Patent Grant
Actuator having deflected fixed comb electrodes and movable comb el...
Patent number
7,808,150
Issue date
Oct 5, 2010
Seiko Epson Corporation
Mitsuhiro Yoda
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Actuator having fixed and movable comb electrodes
Patent number
7,719,163
Issue date
May 18, 2010
Seiko Epson Corporation
Mitsuhiro Yoda
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
ACTUATOR AND METHOD FOR MANUFACTURING THE SAME
Publication number
20100045137
Publication date
Feb 25, 2010
SEIKO EPSON CORPORATION
Mitsuhiro YODA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Actuator and method for manufacturing the same
Publication number
20060279169
Publication date
Dec 14, 2006
Mitsuhiro Yoda
B81 - MICRO-STRUCTURAL TECHNOLOGY