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Keiji Ishibashi
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Tama, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Epitaxial film forming method, sputtering apparatus, manufacturing...
Patent number
10,844,470
Issue date
Nov 24, 2020
Canon Anelva Corporation
Yoshiaki Daigo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Epitaxial film forming method, vacuum processing apparatus, semicon...
Patent number
9,252,322
Issue date
Feb 2, 2016
Canon Anelva Corporation
Yoshiaki Daigo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum processing apparatus
Patent number
7,981,216
Issue date
Jul 19, 2011
Canon Anelva Corporation
Keiji Ishibashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Hydrogen atom generation source in vacuum treatment apparatus, and...
Patent number
7,771,701
Issue date
Aug 10, 2010
Canon Anelva Corporation
Hironobu Umemoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Heating element CVD system and connection structure between heating...
Patent number
7,211,152
Issue date
May 1, 2007
Anelva Corporation
Keiji Ishibashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Silicon oxide film formation method
Patent number
6,955,836
Issue date
Oct 18, 2005
Anelva Corporation
Akira Kumagai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Hot element CVD apparatus and a method for removing a deposited film
Patent number
6,942,892
Issue date
Sep 13, 2005
Anelva Corporation
Keiji Ishibashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Heating element CVD system
Patent number
6,593,548
Issue date
Jul 15, 2003
Japan as represented by President of Japan Advanced Institute of Science and...
Hideki Matsumura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for removing a deposited film
Patent number
6,375,756
Issue date
Apr 23, 2002
Anelva Corporation
Keiji Ishibashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Combined RF-DC magnetron sputtering method
Patent number
6,365,009
Issue date
Apr 2, 2002
Anelva Corporation
Keiji Ishibashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
EPITAXIAL FILM FORMING METHOD, SPUTTERING APPARATUS, MANUFACTURING...
Publication number
20170309480
Publication date
Oct 26, 2017
Canon ANELVA Corporation
Yoshiaki Daigo
C30 - CRYSTAL GROWTH
Information
Patent Application
SrRuO3 FILM DEPOSITION METHOD
Publication number
20140360863
Publication date
Dec 11, 2014
Yoshiaki DAIGO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EPITAXIAL FILM FORMING METHOD, SPUTTERING APPARATUS, MANUFACTURING...
Publication number
20130277206
Publication date
Oct 24, 2013
Yoshiaki DAIGO
C30 - CRYSTAL GROWTH
Information
Patent Application
EPITAXIAL FILM FORMING METHOD, VACUUM PROCESSING APPARATUS, SEMICON...
Publication number
20130049064
Publication date
Feb 28, 2013
CANON ANELVA CORPORATION
Yoshiaki DAIGO
C30 - CRYSTAL GROWTH
Information
Patent Application
VACUUM TREATMENT APPARATUS
Publication number
20100126669
Publication date
May 27, 2010
Canon ANELVA Corporation
Akira Kumagai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20100037822
Publication date
Feb 18, 2010
Canon ANELVA Corporation
Keiji ISHIBASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film-forming system and film-forming method
Publication number
20090126629
Publication date
May 21, 2009
Akira Kumagai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TARGET STRUCTURE AND TARGET HOLDING APPARATUS
Publication number
20090078564
Publication date
Mar 26, 2009
Canon ANELVA Corporation
Keiji Ishibashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Hydrogen Atom Generation Source in Vacuum Treatment Apparatus, and...
Publication number
20090004100
Publication date
Jan 1, 2009
CANON ANELVA CORPORATION
Hironobu Umemoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Sputtering method and sputtering device
Publication number
20070114122
Publication date
May 24, 2007
Canon ANELVA Corporation
Keiji Ishibashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Heating element CVD system and heating element CVD metod using the...
Publication number
20060254516
Publication date
Nov 16, 2006
Minoru Karasawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film-forming system and film-forming method
Publication number
20060127600
Publication date
Jun 15, 2006
Akira Kumagai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Vacuum Processing Apparatus
Publication number
20050217576
Publication date
Oct 6, 2005
ANELVA CORPORATION
Keiji Ishibashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Heating element CVD system and connection structure between heating...
Publication number
20040065260
Publication date
Apr 8, 2004
ANELVA CORPORATION
Keiji Ishibashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film-forming system and film-forming method
Publication number
20040050328
Publication date
Mar 18, 2004
Akira Kumagai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Heating element CVD system and heating element CVD method using the...
Publication number
20030131795
Publication date
Jul 17, 2003
Minoru Karasawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Silicon oxide film formation method
Publication number
20030118748
Publication date
Jun 26, 2003
Akira Kumagai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Heating element cvd system
Publication number
20020189545
Publication date
Dec 19, 2002
Hideki Matsumura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...