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Keiji KATO
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Kamisato, JP
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last 30 patents
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Patent Grant
Optical inspection method and its apparatus
Patent number
8,781,758
Issue date
Jul 15, 2014
Hitachi High-Technologies Corporation
Shigeru Serikawa
G11 - INFORMATION STORAGE
Patents Applications
last 30 patents
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Patent Application
OPTICAL SURFACE DEFECT INSPECTION APPARATUS AND OPTICAL SURFACE DEF...
Publication number
20130286386
Publication date
Oct 31, 2013
Hitachi High-Technologies Corporation
Shigeru SERIKAWA
G01 - MEASURING TESTING
Information
Patent Application
OPTICAL INSPECTION METHOD AND ITS APPARATUS
Publication number
20120046885
Publication date
Feb 23, 2012
Hitachi High-Technologies Corporation
Shigeru SERIKAWA
G01 - MEASURING TESTING
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Patent Application
DISK SURFACE DEFECT INSPECTION METHOD AND APPARATUS
Publication number
20100246356
Publication date
Sep 30, 2010
Hitachi High-Technologies Corporation
Bin Abdulrashid FARIZ
G01 - MEASURING TESTING