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Keiji Kawasaki
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Seto-city, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Electrostatic chuck
Patent number
7,403,386
Issue date
Jul 22, 2008
NGK Insulators, Ltd.
Yasufumi Aihara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heating apparatus
Patent number
7,279,661
Issue date
Oct 9, 2007
NGK Insulators, Ltd.
Hisakazu Okajima
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
Electrostatic chuck
Publication number
20060279899
Publication date
Dec 14, 2006
NGK Insulators, Ltd.
Yasufumi Aihara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Heating apparatus
Publication number
20030075537
Publication date
Apr 24, 2003
NGK Insulators, Ltd.
Hisakazu Okajima
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR