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Keiji Kitagaito
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Kurokawa-gun, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma etching method and plasma etching apparatus
Patent number
11,355,352
Issue date
Jun 7, 2022
Tokyo Electron Limited
Keiji Kitagaito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching method and plasma etching apparatus
Patent number
10,707,091
Issue date
Jul 7, 2020
Tokyo Electron Limited
Keiji Kitagaito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching method and plasma etching apparatus
Patent number
10,163,653
Issue date
Dec 25, 2018
Tokyo Electron Limited
Keiji Kitagaito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method
Patent number
9,396,962
Issue date
Jul 19, 2016
Tokyo Electron Limited
Keiji Kitagaito
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
Publication number
20220262646
Publication date
Aug 18, 2022
TOKYO ELECTRON LIMITED
Keiji KITAGAITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
Publication number
20200294812
Publication date
Sep 17, 2020
TOKYO ELECTRON LIMITED
Keiji KITAGAITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
Publication number
20190088497
Publication date
Mar 21, 2019
TOKYO ELECTRON LIMITED
Keiji KITAGAITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
Publication number
20160086817
Publication date
Mar 24, 2016
TOKYO ELECTRON LIMITED
Keiji KITAGAITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD
Publication number
20150243522
Publication date
Aug 27, 2015
TOKYO ELECTRON LIMITED
Keiji Kitagaito
H01 - BASIC ELECTRIC ELEMENTS