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Keiji Magara
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Kyoto, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
12,094,732
Issue date
Sep 17, 2024
SCREEN Holdings Co., Ltd.
Keisuke Miyajima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treating apparatus
Patent number
7,243,911
Issue date
Jul 17, 2007
Dainippon Screen Mfg. Co., Ltd.
Yoshitaka Abiko
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240234160
Publication date
Jul 11, 2024
SCREEN Holdings Co., Ltd.
Keiji MAGARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20220037173
Publication date
Feb 3, 2022
SCREEN Holdings Co., Ltd.
Keisuke MIYAJIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20120074102
Publication date
Mar 29, 2012
Keiji MAGARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate treating apparatus
Publication number
20050161839
Publication date
Jul 28, 2005
Dainippon Screen Mfg. Co., Ltd.
Yoshitaka Abiko
B08 - CLEANING