Keiji Nakagawa

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Kadoma, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for heat-treating wafers
- Patent number 4,849,608
- Issue date Jul 18, 1989
- Dainippon Screen Mfg. Co., Ltd.
- Yusuke Muraoka
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat processing apparatus for semiconductor manufacturing
- Patent number 4,803,948
- Issue date Feb 14, 1989
- Dainippon Screen Mfg. Co., Ltd.
- Keiji Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...