Keiji Onzuka

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 12,183,613
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Kouzou Kanagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 11,978,644
- Issue date May 7, 2024
- Tokyo Electron Limited
- Kouzou Kanagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate aligning method, substrate receiving method, substrate li...
- Patent number 11,626,277
- Issue date Apr 11, 2023
- Tokyo Electron Limited
- Keiji Onzuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 11,469,114
- Issue date Oct 11, 2022
- Tokyo Electron Limited
- Kouzou Kanagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,818,532
- Issue date Oct 27, 2020
- Tokyo Electron Limited
- Keiji Onzuka
- B08 - CLEANING
Information Patent Grant
Substrate aligning method, substrate receiving method, substrate li...
- Patent number 10,770,283
- Issue date Sep 8, 2020
- Tokyo Electron Limited
- Keiji Onzuka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20240242975
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Kouzou KANAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20220392779
- Publication date Dec 8, 2022
- TOKYO ELECTRON LIMITED
- Kouzou KANAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20210111038
- Publication date Apr 15, 2021
- TOKYO ELECTRON LIMITED
- Kouzou KANAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20210111054
- Publication date Apr 15, 2021
- TOKYO ELECTRON LIMITED
- Kouzou KANAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE ALIGNING METHOD, SUBSTRATE RECEIVING METHOD, SUBSTRATE LI...
- Publication number 20200365393
- Publication date Nov 19, 2020
- TOKYO ELECTRON LIMITED
- Keiji Onzuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180166310
- Publication date Jun 14, 2018
- TOKYO ELECTRON LIMITED
- Keiji ONZUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE ALIGNING METHOD, SUBSTRATE RECEIVING METHOD, SUBSTRATE LI...
- Publication number 20170178930
- Publication date Jun 22, 2017
- TOKYO ELECTRON LIMITED
- Keiji Onzuka
- H01 - BASIC ELECTRIC ELEMENTS

Keiji Onzuka

Person

Patents Grantslast 30 patents

Substrate processing system and substrate processing method

Substrate processing system and substrate processing method

Substrate aligning method, substrate receiving method, substrate li...

Substrate processing system and substrate processing method

Substrate processing apparatus

Substrate aligning method, substrate receiving method, substrate li...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SUBSTRATE ALIGNING METHOD, SUBSTRATE RECEIVING METHOD, SUBSTRATE LI...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE ALIGNING METHOD, SUBSTRATE RECEIVING METHOD, SUBSTRATE LI...