Keiji Osada

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Transfer method
- Patent number 11,302,550
- Issue date Apr 12, 2022
- Tokyo Electron Limited
- Yohei Kawamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,186,422
- Issue date Jan 22, 2019
- Tokyo Electron Limited
- Naohide Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus and processing method
- Patent number 9,828,675
- Issue date Nov 28, 2017
- Tokyo Electron Limited
- Naohide Ito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 9,766,617
- Issue date Sep 19, 2017
- Tokyo Electron Limited
- Junichi Ogawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing system and substrate position correction method
- Patent number 9,318,363
- Issue date Apr 19, 2016
- Tokyo Electron Limited
- Kozo Kai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System, method and storage medium for controlling a processing system
- Patent number 8,571,703
- Issue date Oct 29, 2013
- Tokyo Electron Limited
- Masahiro Numakura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate positioning device, substrate positioning method and program
- Patent number 7,672,502
- Issue date Mar 2, 2010
- Tokyo Electron Limited
- Keiji Osada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TRANSFER METHOD
- Publication number 20200105564
- Publication date Apr 2, 2020
- TOKYO ELECTRON LIMITED
- Yohei KAWAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20160307784
- Publication date Oct 20, 2016
- TOKYO ELECTRON LIMITED
- Satoshi GOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20160093520
- Publication date Mar 31, 2016
- TOKYO ELECTRON LIMITED
- Naohide ITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE POSITION CORRECTION METHOD
- Publication number 20150005928
- Publication date Jan 1, 2015
- Kozo Kai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140121814
- Publication date May 1, 2014
- TOKYO ELECTRON LIMITED
- Junichi OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140109833
- Publication date Apr 24, 2014
- TOKYO ELECTRON LIMITED
- Naohide ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing System
- Publication number 20090259335
- Publication date Oct 15, 2009
- Tokyo Electron Limited
- Gaku Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM, METHOD AND STORAGE MEDIUM FOR CONTROLLING A PROCESSING SYSTEM
- Publication number 20090076648
- Publication date Mar 19, 2009
- TOKYO ELECTRON LIMITED
- Masahiro NUMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate positioning device, substrate positioning method and program
- Publication number 20060222236
- Publication date Oct 5, 2006
- TOKYO ELECTRON LIMITED
- Keiji Osada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Keiji Osada

Person

Patents Grantslast 30 patents

Transfer method

Substrate processing apparatus

Processing apparatus and processing method

Substrate processing apparatus

Substrate processing system and substrate position correction method

System, method and storage medium for controlling a processing system

Substrate positioning device, substrate positioning method and program

Patents Applicationslast 30 patents

TRANSFER METHOD

SUBSTRATE PROCESSING SYSTEM

PROCESSING APPARATUS AND PROCESSING METHOD

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE POSITION CORRECTION METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

Substrate Processing System

SYSTEM, METHOD AND STORAGE MEDIUM FOR CONTROLLING A PROCESSING SYSTEM

Substrate positioning device, substrate positioning method and program