Keiji Shinohara

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming a metal plug in a contact hole
- Patent number 6,355,553
- Issue date Mar 12, 2002
- Sony Corporation
- Keiji Shinohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming metallic wiring pattern
- Patent number 5,914,277
- Issue date Jun 22, 1999
- Sony Corporation
- Keiji Shinohara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for etching copper containing metallic film and for forming...
- Patent number 5,591,302
- Issue date Jan 7, 1997
- Sony Corporation
- Keiji Shinohara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for etching copper containing metallic film and for forming...
- Patent number 5,569,627
- Issue date Oct 29, 1996
- Sony Corporation
- Keiji Shinohara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for etching copper containing metallic film and forming cop...
- Patent number 5,505,322
- Issue date Apr 9, 1996
- Sony Corporation
- Keiji Shinohara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal wiring
- Patent number 5,502,334
- Issue date Mar 26, 1996
- Sony Corporation
- Keiji Shinohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching method
- Patent number 5,312,515
- Issue date May 17, 1994
- Sony Corporation
- Keiji Shinohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multilayer connector
- Patent number 5,288,952
- Issue date Feb 22, 1994
- Sony Corporation
- Junichi Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching process for films of aluminum or its alloys
- Patent number 5,207,868
- Issue date May 4, 1993
- Sony Corporation
- Keiji Shinohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching method
- Patent number 5,200,032
- Issue date Apr 6, 1993
- Sony Corporation
- Keiji Shinohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching method
- Patent number 5,194,118
- Issue date Mar 16, 1993
- Sony Corporation
- Keiji Shinohara
- H01 - BASIC ELECTRIC ELEMENTS

Keiji Shinohara

Person

Patents Grantslast 30 patents

Method of forming a metal plug in a contact hole

Method for forming metallic wiring pattern

Process for etching copper containing metallic film and for forming...

Process for etching copper containing metallic film and for forming...

Process for etching copper containing metallic film and forming cop...

Metal wiring

Dry etching method

Multilayer connector

Etching process for films of aluminum or its alloys

Dry etching method

Dry etching method