Keiji TABUKI

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Niraski City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Deposition method
- Patent number 12,237,167
- Issue date Feb 25, 2025
- Tokyo Electron Limited
- Ken Okoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,923,177
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Keiji Tabuki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITION METHOD
- Publication number 20220254629
- Publication date Aug 11, 2022
- TOKYO ELECTRON LIMITED
- Ken OKOSHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20220013333
- Publication date Jan 13, 2022
- TOKYO ELECTRON LIMITED
- Keiji TABUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL HEAT TREATMENT APPARATUS AND METHOD OF OPERATING VERTICAL...
- Publication number 20150376789
- Publication date Dec 31, 2015
- TOKYO ELECTRON LIMITED
- Yutaka MOTOYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS OF FORMING SILICON NITRIDE FILM
- Publication number 20140106577
- Publication date Apr 17, 2014
- TOKYO ELECTRON LIMITED
- Yamato TONEGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...