Keiji Tada

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Kudamatsu, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for detecting an end point of etching
- Patent number 5,118,378
- Issue date Jun 2, 1992
- Hitachi, Ltd.
- Tatsuo Moroi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of detecting an end point of plasma treatment
- Patent number 4,936,967
- Issue date Jun 26, 1990
- Hitachi, Ltd.
- Shoji Ikuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of and apparatus for detecting an end point of plasma treatment
- Patent number 4,615,761
- Issue date Oct 7, 1986
- Hitachi, Ltd.
- Keiji Tada
- G01 - MEASURING TESTING