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Keiji Tanouchi
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Nirasaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate cleaning method, substrate cleaning system, and memory me...
Patent number
11,367,630
Issue date
Jun 21, 2022
Tokyo Electron Limited
Miyako Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning method, substrate cleaning system, and memory me...
Patent number
10,811,283
Issue date
Oct 20, 2020
Tokyo Electron Limited
Miyako Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern forming method and heating apparatus
Patent number
10,121,659
Issue date
Nov 6, 2018
Tokyo Electron Limited
Makoto Muramatsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning method, substrate cleaning system, and memory me...
Patent number
10,043,652
Issue date
Aug 7, 2018
Tokyo Electron Limited
Miyako Kaneko
B08 - CLEANING
Information
Patent Grant
Substrate cleaning method, substrate cleaning system, and memory me...
Patent number
9,953,826
Issue date
Apr 24, 2018
Tokyo Electron Limited
Miyako Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method, substrate processing apparatus, and st...
Patent number
9,881,784
Issue date
Jan 30, 2018
Tokyo Electron Limited
Hiroki Ohno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern forming method and heating apparatus
Patent number
9,859,118
Issue date
Jan 2, 2018
Tokyo Electron Limited
Makoto Muramatsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment method, computer storage medium, and substrate...
Patent number
9,748,101
Issue date
Aug 29, 2017
Tokyo Electron Limited
Makoto Muramatsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pattern forming method, pattern forming apparatus, and computer rea...
Patent number
9,618,849
Issue date
Apr 11, 2017
Tokyo Electron Limited
Makoto Muramatsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pattern forming method, pattern forming apparatus, and non-transito...
Patent number
9,530,645
Issue date
Dec 27, 2016
Tokyo Electron Limited
Makoto Muramatsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of processing a substrate and apparatus processing the same
Patent number
7,976,896
Issue date
Jul 12, 2011
Tokyo Electron Limited
Yoshiteru Fukuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate treatment method for etching a base film using a resist p...
Patent number
7,781,342
Issue date
Aug 24, 2010
Tokyo Electron Limited
Mitsuaki Iwashita
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING SYSTEM, AND MEMORY ME...
Publication number
20220277968
Publication date
Sep 1, 2022
TOKYO ELECTRON LIMITED
Miyako KANEKO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD, METHOD OF REMOVING ETCHING RESIDUE, AND STORAGE MEDIUM
Publication number
20210358761
Publication date
Nov 18, 2021
Tokyo Electron Limited
Nobuhiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING SYSTEM, AND MEMORY ME...
Publication number
20200395230
Publication date
Dec 17, 2020
TOKYO ELECTRON LIMITED
Miyako KANEKO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SILICON-CONTAINING FILM ETCHING METHOD, COMPUTER-READABLE STORAGE M...
Publication number
20190181056
Publication date
Jun 13, 2019
TOKYO ELECTRON LIMITED
Nobuhiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING SYSTEM, AND MEMORY ME...
Publication number
20180182610
Publication date
Jun 28, 2018
TOKYO ELECTRON LIMITED
Miyako KANEKO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERN FORMING METHOD AND HEATING APPARATUS
Publication number
20180019118
Publication date
Jan 18, 2018
TOKYO ELECTRON LIMITED
Makoto MURAMATSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERN FORMING METHOD AND HEATING APPARATUS
Publication number
20160293403
Publication date
Oct 6, 2016
Tokyo Electron Limited
Makoto MURAMATSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
Publication number
20160118242
Publication date
Apr 28, 2016
TOKYO ELECTRON LIMITED
Hiroki Ohno
B08 - CLEANING
Information
Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM, AND SUBSTRATE...
Publication number
20150255271
Publication date
Sep 10, 2015
TOKYO ELECTRON LIMITED
Makoto Muramatsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND S...
Publication number
20150228512
Publication date
Aug 13, 2015
TOKYO ELECTRON LIMITED
Makoto Muramatsu
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING SYSTEM, AND MEMORY ME...
Publication number
20150128995
Publication date
May 14, 2015
TOKYO ELECTRON LIMITED
Miyako KANEKO
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING SYSTEM, AND MEMORY ME...
Publication number
20150128994
Publication date
May 14, 2015
TOKYO ELECTRON LIMITED
Miyako KANEKO
B08 - CLEANING
Information
Patent Application
PATTERN FORMING METHOD, PATTERN FORMING APPARATUS, AND NON-TRANSITO...
Publication number
20150072536
Publication date
Mar 12, 2015
TOKYO ELECTRON LIMITED
Makoto Muramatsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERN FORMING METHOD, PATTERN FORMING APPARATUS, AND COMPUTER REA...
Publication number
20150062545
Publication date
Mar 5, 2015
TOKYO ELECTRON LIMITED
Makoto Muramatsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
Publication number
20120328273
Publication date
Dec 27, 2012
Hisashi KAWANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
Publication number
20100307683
Publication date
Dec 9, 2010
TOKYO ELECTRON LIMITED
Mitsuaki IWASHITA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate Treatment Method and Substrate Treatment Apparatus
Publication number
20070243711
Publication date
Oct 18, 2007
TOKYO ELECTRON LIMITED
Mitsuaki Iwashita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of processing a substrate and apparatus processing the same
Publication number
20070082134
Publication date
Apr 12, 2007
TOKYO ELECTON LIMITED
Yoshiteru Fukuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate processing method
Publication number
20060068337
Publication date
Mar 30, 2006
TOKYO ELECTRON LIMITED
Keiji Tanouchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY