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Keiji Yamada
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Osaka, JP
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last 30 patents
Information
Patent Grant
Process of making a thin film
Patent number
6,090,457
Issue date
Jul 18, 2000
Sanyo Vaccum Industries Co. Ltd.
Akihiro Kitabatake
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming a thin film and apparatus for the same
Patent number
6,083,365
Issue date
Jul 4, 2000
Sanyo Vacuum Industries Co. Ltd.
Akihiro Kitabatake
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dry etching device
Patent number
5,958,141
Issue date
Sep 28, 1999
Sanyo Vacuum Industries Co., Ltd.
Akihiro Kitabatake
H01 - BASIC ELECTRIC ELEMENTS