Keiji Yamada

Person

  • Osaka, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Process of making a thin film

    • Patent number 6,090,457
    • Issue date Jul 18, 2000
    • Sanyo Vaccum Industries Co. Ltd.
    • Akihiro Kitabatake
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method for forming a thin film and apparatus for the same

    • Patent number 6,083,365
    • Issue date Jul 4, 2000
    • Sanyo Vacuum Industries Co. Ltd.
    • Akihiro Kitabatake
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Dry etching device

    • Patent number 5,958,141
    • Issue date Sep 28, 1999
    • Sanyo Vacuum Industries Co., Ltd.
    • Akihiro Kitabatake
    • H01 - BASIC ELECTRIC ELEMENTS