Keiji Yoshimura

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 8,558,986
- Issue date Oct 15, 2013
- Canon Kabushiki Kaisha
- Keiji Yoshimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 7,502,098
- Issue date Mar 10, 2009
- Canon Kabushiki Kaisha
- Keiji Yoshimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, semiconductor device manufacturing method, main...
- Patent number 6,934,004
- Issue date Aug 23, 2005
- Canon Kabushiki Kaisha
- Keiji Yoshimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 6,424,405
- Issue date Jul 23, 2002
- Canon Kabushiki Kaisha
- Hiroshi Kurosawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and apparatus
- Patent number 6,383,940
- Issue date May 7, 2002
- Canon Kabushiki Kaisha
- Keiji Yoshimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 6,204,911
- Issue date Mar 20, 2001
- Canon Kabushiki Kaisha
- Hiroshi Kurosawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method using pulsed light and changing means...
- Patent number 5,914,773
- Issue date Jun 22, 1999
- Canon Kabushiki Kaisha
- Hiroshi Kurosawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method of manufacturing a device using the same
- Patent number 5,898,477
- Issue date Apr 27, 1999
- Canon Kabushiki Kaisha
- Keiji Yoshimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning projection exposure method and apparatus
- Patent number 5,883,701
- Issue date Mar 16, 1999
- Canon Kabushiki Kaisha
- Noriyasu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Output control method for excimer laser
- Patent number 5,757,838
- Issue date May 26, 1998
- Canon Kabushiki Kaisha
- Noriyasu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100123884
- Publication date May 20, 2010
- Canon Kabushiki Kaisha
- Keiji Yoshimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20080062395
- Publication date Mar 13, 2008
- Canon Kabushiki Kaisha
- Keiji Yoshimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, semiconductor device manufacturing method, main...
- Publication number 20030174298
- Publication date Sep 18, 2003
- Canon Kabushiki Kaisha
- Keiji Yoshimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, semiconductor device manufacturing method, exp...
- Publication number 20020039845
- Publication date Apr 4, 2002
- Keiji Yoshimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20010012100
- Publication date Aug 9, 2001
- Hiroshi Kurosawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Keiji Yoshimura

Person

Patents Grantslast 30 patents

Exposure apparatus and device manufacturing method

Exposure apparatus

Exposure apparatus, semiconductor device manufacturing method, main...

Exposure apparatus and device manufacturing method

Exposure method and apparatus

Exposure apparatus and device manufacturing method

Exposure apparatus and method using pulsed light and changing means...

Exposure apparatus and method of manufacturing a device using the same

Scanning projection exposure method and apparatus

Output control method for excimer laser

Patents Applicationslast 30 patents

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS

Exposure apparatus, semiconductor device manufacturing method, main...

Exposure apparatus, semiconductor device manufacturing method, exp...

Exposure apparatus and device manufacturing method