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Keiko Kuzawa
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Kyoto, JP
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last 30 patents
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Patent Grant
Ion source, ion implantation apparatus, and ion implantation method
Patent number
7,791,041
Issue date
Sep 7, 2010
Nissin Ion Equipment Co., Ltd.
Takatoshi Yamashita
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
ION SOURCE, ION IMPLANTATION APPARATUS, AND ION IMPLANTATION METHOD
Publication number
20090078890
Publication date
Mar 26, 2009
NISSIN ION EQUIPMENT CO., LTD.
Takatoshi Yamashita
H01 - BASIC ELECTRIC ELEMENTS