Keiko Takahashi

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Cluster tool and transfer control method
- Patent number 7,245,987
- Issue date Jul 17, 2007
- Tokyo Electron Limited
- Kiyohito Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster tool and method for controlling transport
- Patent number 6,970,770
- Issue date Nov 29, 2005
- Tokyo Electron Limited
- Kiyohito Iljima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Cluster tool and transfer control method
- Publication number 20050220577
- Publication date Oct 6, 2005
- TOKYO ELECTRON LIMITED
- Kiyohito Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cluster tool and method for controlling transport
- Publication number 20040117059
- Publication date Jun 17, 2004
- Kiyohito IIjima
- H01 - BASIC ELECTRIC ELEMENTS