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Keiko YOSHIMIZU
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Yokohama-shi, JP
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last 30 patents
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Patent Grant
Defect inspection device using catadioptric objective lens
Patent number
8,553,216
Issue date
Oct 8, 2013
Hitachi, Ltd.
Keiko Yoshimizu
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
DEFECT INSPECTION DEVICE USING CATADIOPTRIC OBJECTIVE LENS
Publication number
20120281207
Publication date
Nov 8, 2012
Keiko Yoshimizu
G02 - OPTICS
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Patent Application
Adjustable Beam Size Illumination Optical Apparatus and Beam Size A...
Publication number
20110228537
Publication date
Sep 22, 2011
HITACHI VIA MECHANICS, LTD.
Keiko YOSHIMIZU
G02 - OPTICS