TREA

Keishi Akiba

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Patents Grantslast 30 patents

  • Information Patent Grant

    Method for forming a CVD film
    • Patent number 5,963,834
    • Issue date Oct 5, 1999
    • Tokyo Electron Limited
    • Tatsuo Hatano
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...