Membership
Tour
Register
Log in
Keishi Shionaga
Follow
Person
Tokyo, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Clamp apparatus, substrate carry-in/out apparatus using the same, a...
Patent number
9,857,124
Issue date
Jan 2, 2018
Tokyo Electron Limited
Mitsuru Obara
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Reaction tube and heat processing apparatus for a semiconductor pro...
Patent number
8,216,378
Issue date
Jul 10, 2012
Tokyo Electron Limited
Hirofumi Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CLAMP APPARATUS, SUBSTRATE CARRY-IN/OUT APPARATUS USING THE SAME, A...
Publication number
20160273836
Publication date
Sep 22, 2016
TOKYO ELECTRON LIMITED
Mitsuru Obara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REACTION TUBE AND HEAT PROCESSING APPARATUS FOR A SEMICONDUCTOR PRO...
Publication number
20090250005
Publication date
Oct 8, 2009
TOKYO ELECTRON LIMITED
Hirofumi Kaneko
H01 - BASIC ELECTRIC ELEMENTS