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Keishi Tanaka
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Phase-shift mask, manufacturing method thereof and manufacturing me...
Patent number
7,754,397
Issue date
Jul 13, 2010
Toppan Printing Co., Ltd.
Toshio Konishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Levenson type phase shift mask and manufacturing method thereof
Patent number
7,632,613
Issue date
Dec 15, 2009
Toppan Printing Co., Ltd.
Yosuke Kojima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Phase-shift mask, manufacturing method thereof and manufacturing me...
Publication number
20070269726
Publication date
Nov 22, 2007
Toppan Printing Co., Ltd.
Toshio Konishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Levenson type phase shift mask and manufacturing method thereof
Publication number
20070037072
Publication date
Feb 15, 2007
Toppan Printing Co., Ltd.
Yosuke Kojima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY