Keisuke Akinaga

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and operating method of plasma processi...
- Patent number 11,244,803
- Issue date Feb 8, 2022
- HITACHI HIGH-TECH CORPORATION
- Keisuke Akinaga
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING PROCESSING METHOD
- Publication number 20240312789
- Publication date Sep 19, 2024
- Hitachi High-Tech Corporation
- Takashi HATTORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SUPPLY APPARATUS, VACUUM PROCESSING APPARATUS, AND GAS SUPPLY M...
- Publication number 20240055278
- Publication date Feb 15, 2024
- Hitachi High-Tech Corporation
- Yoshifumi Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND OPERATING METHOD OF PLASMA PROCESSI...
- Publication number 20210296082
- Publication date Sep 23, 2021
- Hitachi High-Tech Corporation
- Keisuke Akinaga
- H01 - BASIC ELECTRIC ELEMENTS