Keisuke FUKADA

Person

Chichibu-shi, Saitama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer supporting mechanism, chemical vapor deposition apparatus, an...
- Patent number 11,427,929
- Issue date Aug 30, 2022
- Showa Denko K.K.
- Jia Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus having particular arrangement of raw material...
- Patent number 11,424,147
- Issue date Aug 23, 2022
- Showa Denko K.K.
- Keisuke Fukada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiC epitaxial wafer and method for producing same
- Patent number 11,107,892
- Issue date Aug 31, 2021
- Showa Denko K.K.
- Keisuke Fukada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus
- Patent number 10,896,831
- Issue date Jan 19, 2021
- NuFlare Technology, Inc.
- Kunihiko Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiC epitaxial growth apparatus
- Patent number 10,801,128
- Issue date Oct 13, 2020
- Showa Denko K.K.
- Yasunori Motoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing SiC epitaxial wafer by simultaneously util...
- Patent number 10,262,863
- Issue date Apr 16, 2019
- Showa Denko K.K.
- Keisuke Fukada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SiC EPITAXIAL WAFER, AND METHOD OF MANUFACTURING THE SAME
- Publication number 20230055999
- Publication date Feb 23, 2023
- SHOWA DENKO K.K.
- Yoshitaka Nishihara
- C30 - CRYSTAL GROWTH
Information Patent Application
SiC EPITAXIAL WAFER AND METHOD FOR MANUFACTURING SIC EPITAXIAL WAFER
- Publication number 20220149160
- Publication date May 12, 2022
- SHOWA DENKO K.K.
- Naoto ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUSCEPTOR AND CHEMICAL VAPOR DEPOSITION APPARATUS
- Publication number 20210217648
- Publication date Jul 15, 2021
- SHOWA DENKO K.K.
- Jia YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUSCEPTOR, CVD APPARATUS, AND METHOD FOR MANUFACTURING EPITAXIAL WAFER
- Publication number 20210066113
- Publication date Mar 4, 2021
- SHOWA DENKO K.K.
- Yoshikazu UMETA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SiC EPITAXIAL WAFER, AND METHOD OF MANUFACTURING THE SAME
- Publication number 20200251561
- Publication date Aug 6, 2020
- SHOWA DENKO K.K.
- Yoshitaka NISHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUSCEPTOR AND CHEMICAL VAPOR DEPOSITION APPARATUS
- Publication number 20200181798
- Publication date Jun 11, 2020
- SHOWA DENKO K.K.
- Yuichiro MABUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS
- Publication number 20200118849
- Publication date Apr 16, 2020
- SHOWA DENKO K.K.
- Keisuke FUKADA
- G01 - MEASURING TESTING
Information Patent Application
SUSCEPTOR AND CHEMICAL VAPOR DEPOSITION APPARATUS
- Publication number 20200083085
- Publication date Mar 12, 2020
- SHOWA DENKO K.K.
- Jia YU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SIC EPITAXIAL WAFER AND METHOD FOR PRODUCING SAME
- Publication number 20200083330
- Publication date Mar 12, 2020
- SHOWA DENKO K.K.
- Keisuke FUKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SiC EPITAXIAL WAFER AND METHOD FOR PRODUCING SAME
- Publication number 20190376206
- Publication date Dec 12, 2019
- SHOWA DENKO K.K.
- Keisuke FUKADA
- C30 - CRYSTAL GROWTH
Information Patent Application
P-TYPE SIC EPITAXIAL WAFER AND PRODUCTION METHOD THEREFOR
- Publication number 20190316273
- Publication date Oct 17, 2019
- SHOWA DENKO K.K.
- Naoto ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS PIPING SYSTEM, CHEMICAL VAPOR DEPOSITION DEVICE, FILM DEPOSITIO...
- Publication number 20190169742
- Publication date Jun 6, 2019
- SHOWA DENKO K.K.
- Naoto ISHIBASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SIC EPITAXIAL GROWTH APPARATUS
- Publication number 20190161886
- Publication date May 30, 2019
- SHOWA DENKO K.K.
- Yasunori MOTOYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SIC EPITAXIAL GROWTH APPARATUS
- Publication number 20190161885
- Publication date May 30, 2019
- SHOWA DENKO K.K.
- Yasunori MOTOYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION APPARATUS
- Publication number 20190144995
- Publication date May 16, 2019
- SHOWA DENKO K.K.
- Naoto ISHIBASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SIC EPITAXIAL WAFER
- Publication number 20190148496
- Publication date May 16, 2019
- SHOWA DENKO K.K.
- Naoto ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER SUPPORTING MECHANISM, CHEMICAL VAPOR DEPOSITION APPARATUS, AN...
- Publication number 20180371640
- Publication date Dec 27, 2018
- SHOWA DENKO K.K.
- Jia YU
- C30 - CRYSTAL GROWTH
Information Patent Application
FILM FORMING APPARTUS
- Publication number 20180374721
- Publication date Dec 27, 2018
- NuFlare Technology, Inc.
- Kunihiko Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SIC EPITAXIAL WAFER AND SIC EPITAXIAL GROW...
- Publication number 20170345658
- Publication date Nov 30, 2017
- SHOWA DENKO K.K.
- Keisuke FUKADA
- C30 - CRYSTAL GROWTH

Keisuke FUKADA

Person

Patents Grantslast 30 patents

Wafer supporting mechanism, chemical vapor deposition apparatus, an...

Deposition apparatus having particular arrangement of raw material...

SiC epitaxial wafer and method for producing same

Film forming apparatus

SiC epitaxial growth apparatus

Method for manufacturing SiC epitaxial wafer by simultaneously util...

Patents Applicationslast 30 patents

SiC EPITAXIAL WAFER, AND METHOD OF MANUFACTURING THE SAME

SiC EPITAXIAL WAFER AND METHOD FOR MANUFACTURING SIC EPITAXIAL WAFER

SUSCEPTOR AND CHEMICAL VAPOR DEPOSITION APPARATUS

SUSCEPTOR, CVD APPARATUS, AND METHOD FOR MANUFACTURING EPITAXIAL WAFER

SiC EPITAXIAL WAFER, AND METHOD OF MANUFACTURING THE SAME

SUSCEPTOR AND CHEMICAL VAPOR DEPOSITION APPARATUS

DEPOSITION APPARATUS

SUSCEPTOR AND CHEMICAL VAPOR DEPOSITION APPARATUS

SIC EPITAXIAL WAFER AND METHOD FOR PRODUCING SAME

SiC EPITAXIAL WAFER AND METHOD FOR PRODUCING SAME

P-TYPE SIC EPITAXIAL WAFER AND PRODUCTION METHOD THEREFOR

GAS PIPING SYSTEM, CHEMICAL VAPOR DEPOSITION DEVICE, FILM DEPOSITIO...

SIC EPITAXIAL GROWTH APPARATUS

SIC EPITAXIAL GROWTH APPARATUS

CHEMICAL VAPOR DEPOSITION APPARATUS

SIC EPITAXIAL WAFER

WAFER SUPPORTING MECHANISM, CHEMICAL VAPOR DEPOSITION APPARATUS, AN...

FILM FORMING APPARTUS

METHOD FOR MANUFACTURING SIC EPITAXIAL WAFER AND SIC EPITAXIAL GROW...