Keisuke Hamamoto

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate inspection method, substrate inspection apparatus and rec...
- Patent number 11,378,388
- Issue date Jul 5, 2022
- Tokyo Electron Limited
- Kazuya Hisano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,707,109
- Issue date Jul 7, 2020
- Tokyo Electron Limited
- Satoshi Morita
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE THICKNESS MEASURING DEVICE, SUBSTRATE PROCESSING SYSTEM,...
- Publication number 20240369339
- Publication date Nov 7, 2024
- TOKYO ELECTRON LIMITED
- Teruhiko MORIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION APPARATUS AND REC...
- Publication number 20200096321
- Publication date Mar 26, 2020
- TOKYO ELECTRON LIMITED
- Kazuya Hisano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190096730
- Publication date Mar 28, 2019
- TOKYO ELECTRON LIMITED
- Satoshi Morita
- G06 - COMPUTING CALCULATING COUNTING