Keisuke Mikami

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam apparatus and alignment adjustment method of...
- Patent number 10,720,303
- Issue date Jul 21, 2020
- HITACHI HIGH-TECH CORPORATION
- Keisuke Mikami
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND ALIGNMENT ADJUSTMENT METHOD OF...
- Publication number 20180240641
- Publication date Aug 23, 2018
- Hitachi High-Technologies Corporation
- Keisuke MIKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged-Particle Beam Apparatus Having Micro Scale Management Function
- Publication number 20130284922
- Publication date Oct 31, 2013
- Hitachi High-Technologies Corporation
- Keisuke Mikami
- H01 - BASIC ELECTRIC ELEMENTS