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Keisuke MIZUUCHI
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Yokohama-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Electron beam apparatus for inspecting a pattern on a sample using...
Patent number
9,136,091
Issue date
Sep 15, 2015
Ebara Corporation
Toshifumi Kimba
G01 - MEASURING TESTING
Information
Patent Grant
Electron beam apparatus for inspecting a pattern on a sample using...
Patent number
8,639,463
Issue date
Jan 28, 2014
Ebara Corporation
Toshifumi Kimba
G01 - MEASURING TESTING
Information
Patent Grant
XY-coordinate compensation apparatus and method in sample pattern i...
Patent number
8,280,664
Issue date
Oct 2, 2012
Ebara Corporation
Toshifumi Kimba
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
ELECTRON BEAM APPARATUS FOR INSPECTING A PATTERN ON A SAMPLE USING...
Publication number
20140107959
Publication date
Apr 17, 2014
EBARA CORPORATION
Toshifumi KIMBA
G01 - MEASURING TESTING
Information
Patent Application
XY-COORDINATE COMPENSATION APPARATUS AND METHOD IN SAMPLE PATTERN I...
Publication number
20130056635
Publication date
Mar 7, 2013
Toshifumi Kimba
G01 - MEASURING TESTING
Information
Patent Application
XY-COORDINATE COMPENSATION APPARATUS AND METHOD IN SAMPLE PATTERN I...
Publication number
20100282956
Publication date
Nov 11, 2010
Toshifumi Kimba
G01 - MEASURING TESTING