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Keisuke SAKASHITA
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Toyama-shi, JP
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last 30 patents
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Patent Grant
Substrate processing apparatus
Patent number
8,529,701
Issue date
Sep 10, 2013
Hitachi Kokusai Electric Inc.
Shinya Morita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20100050945
Publication date
Mar 4, 2010
Hitachi Kokusai Electric Inc.
Shinya MORITA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...