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Keisuke SASAKI
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Koshi City, JP
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last 30 patents
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Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,211,278
Issue date
Dec 28, 2021
Tokyo Electron Limited
Akihiro Teramoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
10,591,823
Issue date
Mar 17, 2020
Tokyo Electron Limited
Keisuke Yoshida
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Process liquid supply system, process liquid supply method, and sto...
Patent number
8,408,234
Issue date
Apr 2, 2013
Tokyo Electron Limited
Keisuke Sasaki
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
Publication number
20230268202
Publication date
Aug 24, 2023
TOKYO ELECTRON LIMITED
Keita HIRASE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LINEARLY MOVING MECHANISM AND METHOD OF SUPPRESSING PARTICLE SCATTE...
Publication number
20230021035
Publication date
Jan 19, 2023
TOKYO ELECTRON LIMITED
Masami Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Processing Apparatus and Substrate Processing Method
Publication number
20200126823
Publication date
Apr 23, 2020
TOKYO ELECTRON LIMITED
Akihiro TERAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20160181133
Publication date
Jun 23, 2016
TOKYO ELECTRON LIMITED
Keisuke YOSHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, PROGRA...
Publication number
20100043835
Publication date
Feb 25, 2010
TOKYO ELECTRON LIMITED
Kazuyoshi ESHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process liquid supply system, process liquid supply method, and sto...
Publication number
20070221271
Publication date
Sep 27, 2007
Keisuke Sasaki
H01 - BASIC ELECTRIC ELEMENTS