TREA

Keisuke Shigaki

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  • Kumamoto, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Exposure apparatus
    • Patent number 5,028,955
    • Issue date Jul 2, 1991
    • Tokyo Electron Limited
    • Yasushi Hayashida
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Method of ashing layers, and apparatus for ashing layers
    • Patent number 4,812,201
    • Issue date Mar 14, 1989
    • Tokyo Electron Limited
    • Hiroyuki Sakai
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY