Keisuke Shinagawa

Person

Kawasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Steam supplying apparatus and method for controlling same
- Patent number 6,115,538
- Issue date Sep 5, 2000
- Fujitsu Limited
- Keisuke Shinagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of stripping a resist mask
- Patent number 5,998,104
- Issue date Dec 7, 1999
- Fujitsu Limited
- Shuzo Fujimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for removing organic resist from semiconductor
- Patent number 5,961,775
- Issue date Oct 5, 1999
- Fujitsu Limited
- Shuzo Fujimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for controlling apparatus for supplying steam for ashing pro...
- Patent number 5,832,177
- Issue date Nov 3, 1998
- Fujitsu Limited
- Keisuke Shinagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of stripping a resist mask
- Patent number 5,773,201
- Issue date Jun 30, 1998
- Fujitsu Limited
- Shuzo Fujimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Manufacture of semiconductor device with ashing and etching
- Patent number 5,681,780
- Issue date Oct 28, 1997
- Fujitsu Limited
- Satoru Mihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of removing resist mask and a method of manufacturing semico...
- Patent number 5,628,871
- Issue date May 13, 1997
- Fujitsu Limited
- Keisuke Shinagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process and apparatus for ashing treatment
- Patent number 5,478,403
- Issue date Dec 26, 1995
- Fujitsu Limited
- Keisuke Shinagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for producing semiconductor integrated circuits and apparatu...
- Patent number 5,397,432
- Issue date Mar 14, 1995
- Fujitsu Limited
- Jun-ichi Konno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ashing method for removing an organic film on a substance of a semi...
- Patent number 5,057,187
- Issue date Oct 15, 1991
- Fujitsu Ltd.
- Keisuke Shinagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing for stripping organic material
- Patent number 4,983,254
- Issue date Jan 8, 1991
- Fujitsu Limited
- Shuzo Fujimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Ashing method for removing an organic film on a substance of a semi...
- Patent number 4,961,820
- Issue date Oct 9, 1990
- Fujitsu Limited
- Keisuke Shinagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Keisuke Shinagawa

Person

Patents Grantslast 30 patents

Steam supplying apparatus and method for controlling same

Method of stripping a resist mask

Apparatus for removing organic resist from semiconductor

Method for controlling apparatus for supplying steam for ashing pro...

Method of stripping a resist mask

Manufacture of semiconductor device with ashing and etching

Method of removing resist mask and a method of manufacturing semico...

Process and apparatus for ashing treatment

Method for producing semiconductor integrated circuits and apparatu...

Ashing method for removing an organic film on a substance of a semi...

Processing for stripping organic material

Ashing method for removing an organic film on a substance of a semi...