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Keisuke Suzuki
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Iizuka-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for measuring surface properties of polishing pad
Patent number
10,478,936
Issue date
Nov 19, 2019
Ebara Corporation
Hisanori Matsuo
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for measuring surface properties of polishing pad
Patent number
10,401,285
Issue date
Sep 3, 2019
Ebara Corporation
Hisanori Matsuo
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus
Patent number
9,669,515
Issue date
Jun 6, 2017
Ebara Corporation
Hisanori Matsuo
B24 - GRINDING POLISHING
Information
Patent Grant
Method of measuring surface properties of polishing pad
Patent number
8,932,883
Issue date
Jan 13, 2015
Ebara Corporation
Hisanori Matsuo
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
POLISHING APPARATUS AND POLISHING METHOD
Publication number
20230026751
Publication date
Jan 26, 2023
EBARA CORPORATION
Hisanori MATSUO
B24 - GRINDING POLISHING
Information
Patent Application
METHOD AND APPARATUS FOR MEASURING SURFACE PROPERTIES OF POLISHING PAD
Publication number
20160184960
Publication date
Jun 30, 2016
EBARA CORPORATION
Hisanori MATSUO
G01 - MEASURING TESTING
Information
Patent Application
POLISHING APPARATUS
Publication number
20150283669
Publication date
Oct 8, 2015
EBARA CORPORATION
Hisanori MATSUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MEASURING SURFACE PROPERTIES OF POLISHING PAD
Publication number
20140273308
Publication date
Sep 18, 2014
EBARA CORPORATION
Hisanori MATSUO
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS FOR MEASURING SURFACE PROPERTIES OF POLISHING PAD
Publication number
20140262027
Publication date
Sep 18, 2014
KYUSHU INSTITUTE OF TECHNOLOGY
Hisanori MATSUO
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF MANUFACTURING POLISHING PAD MOLD, POLISHING PAD MOLD MANU...
Publication number
20140004780
Publication date
Jan 2, 2014
Yasunori Tashiro
B24 - GRINDING POLISHING