Keisuke Tsugao

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate liquid processing apparatus
- Patent number 10,128,132
- Issue date Nov 13, 2018
- Tokyo Electron Limited
- Junya Minamida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method for detecting clogging of...
- Patent number 10,022,758
- Issue date Jul 17, 2018
- Tokyo Electron Limited
- Tomonori Okumura
- B08 - CLEANING
Information Patent Grant
Substrate liquid processing apparatus, exhaust switching unit and s...
- Patent number 9,842,747
- Issue date Dec 12, 2017
- Tokyo Electron Limited
- Junya Minamida
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD FOR A SUBSTRATE P...
- Publication number 20240120204
- Publication date Apr 11, 2024
- TOKYO ELECTRON LIMITED
- Keisuke TSUGAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD OF SUBSTRATE PROC...
- Publication number 20220399209
- Publication date Dec 15, 2022
- TOKYO ELECTRON LIMITED
- Keisuke Tsugao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220395776
- Publication date Dec 15, 2022
- TOKYO ELECTRON LIMITED
- Keisuke Tsugao
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
- Publication number 20180068873
- Publication date Mar 8, 2018
- TOKYO ELECTRON LIMITED
- Junya Minamida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR DETECTING CLOGGING OF...
- Publication number 20170008044
- Publication date Jan 12, 2017
- TOKYO ELECTRON LIMITED
- Tomonori Okumura
- B08 - CLEANING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, EXHAUST SWITCHING UNIT AND S...
- Publication number 20160124438
- Publication date May 5, 2016
- TOKYO ELECTRON LIMITED
- Junya Minamida
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Keisuke Tsugao

Person

Patents Grantslast 30 patents

Substrate liquid processing apparatus

Substrate processing apparatus and method for detecting clogging of...

Substrate liquid processing apparatus, exhaust switching unit and s...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD FOR A SUBSTRATE P...

SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD OF SUBSTRATE PROC...

GAS PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE LIQUID PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR DETECTING CLOGGING OF...

SUBSTRATE LIQUID PROCESSING APPARATUS, EXHAUST SWITCHING UNIT AND S...