Keisuke UCHIYAMA

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning method and substrate cleaning apparatus
- Patent number 12,030,092
- Issue date Jul 9, 2024
- Ebara Corporation
- Kenji Kodera
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and storage medium having program st...
- Patent number 11,436,392
- Issue date Sep 6, 2022
- Ebara Corporation
- Yu Ishii
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and method for processing a surface of a substrate
- Patent number 11,139,160
- Issue date Oct 5, 2021
- Ebara Corporation
- Yu Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for polishing a substrate, and method for proc...
- Patent number 10,926,376
- Issue date Feb 23, 2021
- Ebara Corporation
- Masayuki Nakanishi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method, polishing apparatus, and substrate processing system
- Patent number 10,854,473
- Issue date Dec 1, 2020
- Ebara Corporation
- Yu Ishii
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and method for cleaning a back surface of a substrate
- Patent number 10,651,057
- Issue date May 12, 2020
- Ebara Corporation
- Kenichi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for polishing a surface of a substrate
- Patent number 10,376,929
- Issue date Aug 13, 2019
- Ebara Corporation
- Yu Ishii
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 9,808,836
- Issue date Nov 7, 2017
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Tape sticking apparatus and tape sticking method
- Patent number 9,738,483
- Issue date Aug 22, 2017
- Ebara Corporation
- Kenya Ito
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate processing apparatus
- Patent number 9,566,616
- Issue date Feb 14, 2017
- Ebara Corporation
- Tetsuji Togawa
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20240109161
- Publication date Apr 4, 2024
- EBARA CORPORATION
- Satoru YAMAMOTO
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS
- Publication number 20220288650
- Publication date Sep 15, 2022
- EBARA CORPORATION
- Kenji Kodera
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING A SURFACE OF A SUBSTRATE
- Publication number 20190148125
- Publication date May 16, 2019
- EBARA CORPORATION
- Yu ISHII
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR POLISHING A SUBSTRATE, AND METHOD FOR PROC...
- Publication number 20190054594
- Publication date Feb 21, 2019
- EBARA CORPORATION
- Masayuki NAKANISHI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND STORAGE MEDIUM HAVING PROGRAM ST...
- Publication number 20180336301
- Publication date Nov 22, 2018
- EBARA CORPORATION
- Yu ISHII
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHOD FOR CLEANING A BACK SURFACE OF A SUBSTRATE
- Publication number 20180315622
- Publication date Nov 1, 2018
- EBARA CORPORATION
- Kenichi KOBAYASHI
- B08 - CLEANING
Information Patent Application
POLISHING METHOD, POLISHING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20180254196
- Publication date Sep 6, 2018
- EBARA CORPORATION
- Yu ISHII
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS AND METHOD FOR POLISHING A SURFACE OF A SUBSTRATE
- Publication number 20180015508
- Publication date Jan 18, 2018
- EBARA CORPORATION
- Yu ISHII
- B08 - CLEANING
Information Patent Application
TAPE STICKING APPARATUS AND TAPE STICKING METHOD
- Publication number 20160023861
- Publication date Jan 28, 2016
- EBARA CORPORATION
- Kenya ITO
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150000055
- Publication date Jan 1, 2015
- EBARA CORPORATION
- Tetsuji TOGAWA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150000056
- Publication date Jan 1, 2015
- EBARA CORPORATION
- Tetsuji TOGAWA
- B08 - CLEANING

Keisuke UCHIYAMA

Person

Patents Grantslast 30 patents

Substrate cleaning method and substrate cleaning apparatus

Substrate processing apparatus and storage medium having program st...

Apparatus and method for processing a surface of a substrate

Method and apparatus for polishing a substrate, and method for proc...

Polishing method, polishing apparatus, and substrate processing system

Apparatus and method for cleaning a back surface of a substrate

Apparatus and method for polishing a surface of a substrate

Substrate processing apparatus

Tape sticking apparatus and tape sticking method

Substrate processing apparatus

Patents Applicationslast 30 patents

POLISHING APPARATUS AND POLISHING METHOD

SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS

APPARATUS AND METHOD FOR PROCESSING A SURFACE OF A SUBSTRATE

METHOD AND APPARATUS FOR POLISHING A SUBSTRATE, AND METHOD FOR PROC...

SUBSTRATE PROCESSING APPARATUS AND STORAGE MEDIUM HAVING PROGRAM ST...

APPARATUS AND METHOD FOR CLEANING A BACK SURFACE OF A SUBSTRATE

POLISHING METHOD, POLISHING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM

APPARATUS AND METHOD FOR POLISHING A SURFACE OF A SUBSTRATE

TAPE STICKING APPARATUS AND TAPE STICKING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS