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Keisuke UEDA
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Kawasaki-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Substrate processing apparatus
Patent number
9,822,450
Issue date
Nov 21, 2017
Canon Anelva Corporation
Toshikazu Nakazawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering apparatus
Patent number
9,368,331
Issue date
Jun 14, 2016
Canon Anelva Corporation
Masato Shinada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus
Patent number
9,127,355
Issue date
Sep 8, 2015
Canon Anelva Corporation
Toshikazu Nakazawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus
Patent number
9,085,820
Issue date
Jul 21, 2015
Canon Anelva Corporation
Toshikazu Nakazawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SPUTTERING APPARATUS
Publication number
20150303042
Publication date
Oct 22, 2015
Canon ANELVA Corporation
MASATO SHINADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20140261182
Publication date
Sep 18, 2014
Canon ANELVA Corporation
Toshikazu NAKAZAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20130161187
Publication date
Jun 27, 2013
Canon ANELVA Corporation
Toshikazu NAKAZAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...