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Keisuke Yoshida
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Koshi City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and substrate processing system
Patent number
11,443,964
Issue date
Sep 13, 2022
Tokyo Electron Limited
Masatoshi Kaneda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment method and thermal treatment apparatus
Patent number
10,656,526
Issue date
May 19, 2020
Tokyo Electron Limited
Yohei Sano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
10,591,823
Issue date
Mar 17, 2020
Tokyo Electron Limited
Keisuke Yoshida
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing method, substrate processing apparatus and rec...
Patent number
10,096,465
Issue date
Oct 9, 2018
Tokyo Electron Limited
Keisuke Yoshida
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate processing method, substrate processing apparatus, substr...
Patent number
9,514,951
Issue date
Dec 6, 2016
Tokyo Electron Limited
Masatoshi Kaneda
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240295821
Publication date
Sep 5, 2024
TOKYO ELECTRON LIMITED
Hiroyuki Fujii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
Publication number
20240248413
Publication date
Jul 25, 2024
TOKYO ELECTRON LIMITED
Takeshi SHIMOAOKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240038533
Publication date
Feb 1, 2024
TOKYO ELECTRON LIMITED
Hiroki TADATOMO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT METHOD AND THERMAL TREATMENT APPARATUS
Publication number
20180164689
Publication date
Jun 14, 2018
TOKYO ELECTRON LIMITED
Yohei SANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND REC...
Publication number
20170294303
Publication date
Oct 12, 2017
TOKYO ELECTRON LIMITED
Keisuke YOSHIDA
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM
Publication number
20170047233
Publication date
Feb 16, 2017
TOKYO ELECTRON LIMITED
Masatoshi Kaneda
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20160181133
Publication date
Jun 23, 2016
TOKYO ELECTRON LIMITED
Keisuke YOSHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, SUBSTR...
Publication number
20150371894
Publication date
Dec 24, 2015
TOKYO ELECTRON LIMITED
Masatoshi Kaneda
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...