Membership
Tour
Register
Log in
Keita Asanuma
Follow
Person
Oita-shi, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Exposure system, test mask for monitoring polarization, and method...
Patent number
7,440,104
Issue date
Oct 21, 2008
Kabushiki Kaisha Toshiba
Takashi Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for correcting a plurality of exposure tools, method for...
Patent number
7,164,960
Issue date
Jan 16, 2007
Kabushiki Kaisha Toshiba
Nobuhiro Komine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method and method of manufacturing semiconductor device
Patent number
6,872,508
Issue date
Mar 29, 2005
Kabushiki Kaisha Toshiba
Nobuhiro Komine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposing method
Patent number
6,842,230
Issue date
Jan 11, 2005
Kabushiki Kaisha Toshiba
Manabu Takakuwa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of electrical measurement of misregistration of patterns
Patent number
6,288,556
Issue date
Sep 11, 2001
Kabushiki Kaisha Toshiba
Takashi Sato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure tool and method capable of correcting high (N-TH) order li...
Patent number
6,008,880
Issue date
Dec 28, 1999
Kabushiki Kaisha Toshiba
Tatsuhiko Higashiki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Exposure system, test mask for monitoring polarization, and method...
Publication number
20060098183
Publication date
May 11, 2006
Takashi Sato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus for correcting a plurality of exposure tools, method for...
Publication number
20050125178
Publication date
Jun 9, 2005
Nobuhiro Komine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposing method
Publication number
20030117599
Publication date
Jun 26, 2003
Kabushiki Kaisha Toshiba
Manabu Takakuwa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure method and method of manufacturing semiconductor device
Publication number
20030016341
Publication date
Jan 23, 2003
Nobuhiro Komine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY