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Yokohama, JP
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Patents Grants
last 30 patents
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Patent Grant
Vibration control system and optical equipment equipped therewith
Patent number
10,607,810
Issue date
Mar 31, 2020
NuFlare Technology, Inc.
Michihiro Kawaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam drawing apparatus
Patent number
9,466,465
Issue date
Oct 11, 2016
NuFlare Technology, Inc.
Keita Ideno
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
VIBRATION CONTROL SYSTEM AND OPTICAL EQUIPMENT EQUIPPED THEREWITH
Publication number
20190214224
Publication date
Jul 11, 2019
NuFlare Technology, Inc.
Michihiro Kawaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS
Publication number
20160203949
Publication date
Jul 14, 2016
NuFlare Technology, Inc.
Hiroyasu SAITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS
Publication number
20150311036
Publication date
Oct 29, 2015
NuFlare Technology, Inc.
Keita IDENO
H01 - BASIC ELECTRIC ELEMENTS