Keita KAMBARA

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and upper electrode assembly
- Patent number 9,773,647
- Issue date Sep 26, 2017
- Tokyo Electron Limited
- Shin Matsuura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
COOLING STRUCTURE AND PARALLEL PLATE ETCHING APPARATUS
- Publication number 20200035464
- Publication date Jan 30, 2020
- TOKYO ELECTRON LIMITED
- Keita KAMBARA
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
UPPER ELECTRODE STRUCTURE OF PLASMA PROCESSING APPARATUS, PLASMA PR...
- Publication number 20170069470
- Publication date Mar 9, 2017
- TOKYO ELECTRON LIMITED
- Koichi Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLING STRUCTURE AND PARALLEL PLATE ETCHING APPARATUS
- Publication number 20160203955
- Publication date Jul 14, 2016
- TOKYO ELECTRON LIMITED
- Keita KAMBARA
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
PLASMA PROCESSING APPARATUS AND FOCUS RING
- Publication number 20160042926
- Publication date Feb 11, 2016
- TOKYO ELECTRON LIMITED
- Takuya ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND UPPER ELECTRODE ASSEMBLY
- Publication number 20160013028
- Publication date Jan 14, 2016
- TOKYO ELECTRON LIMITED
- Shin MATSUURA
- H01 - BASIC ELECTRIC ELEMENTS