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Yokohama-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Mask inspection method and mask inspection apparatus
Patent number
12,050,184
Issue date
Jul 30, 2024
Lasertec Corporation
Keita Saito
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
PHOTODETECTOR
Publication number
20240402592
Publication date
Dec 5, 2024
Lasertec Corporation
Keita SAITO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
MASK INSPECTION METHOD AND MASK INSPECTION APPARATUS
Publication number
20220178847
Publication date
Jun 9, 2022
Lasertec Corporation
Keita SAITO
G01 - MEASURING TESTING