Keita SAKAI

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Imprint apparatus and method of controlling imprint apparatus
- Patent number 11,752,686
- Issue date Sep 12, 2023
- Canon Kabushiki Kaisha
- Hisashi Namba
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Ejection apparatus and imprint apparatus
- Patent number 11,267,252
- Issue date Mar 8, 2022
- Canon Kabushiki Kaisha
- Masahiro Kuri
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Method for determining pattern of mold for imprint, imprint method,...
- Patent number 9,829,789
- Issue date Nov 28, 2017
- Canon Kabushiki Kaisha
- Masayuki Tanabe
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Exposure apparatus, and method of manufacturing a device
- Patent number 9,164,395
- Issue date Oct 20, 2015
- Canon Kabushiki Kaisha
- Keita Sakai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing a calcium fluoride single crystal
- Patent number 7,754,011
- Issue date Jul 13, 2010
- Canon Kabushiki Kaisha
- Keita Sakai
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Exposure apparatus, exposure method, and exposure system
- Patent number 7,714,980
- Issue date May 11, 2010
- Canon Kabushiki Kaisha
- Keita Sakai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion exposure apparatus
- Patent number 7,705,966
- Issue date Apr 27, 2010
- Canon Kabushiki Kaisha
- Keita Sakai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,394,522
- Issue date Jul 1, 2008
- Canon Kabushiki Kaisha
- Noriyasu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing single crystal calcium fluoride
- Patent number 7,105,049
- Issue date Sep 12, 2006
- Canon Kabushiki Kaisha
- Keita Sakai
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Photosensitive resin, resist composition using the photosensitive r...
- Patent number 6,479,212
- Issue date Nov 12, 2002
- Canon Kabushiki Kaisha
- Minoru Matsuda
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Patterning method, and method for manufacturing semiconductor device
- Patent number 6,331,383
- Issue date Dec 18, 2001
- Canon Kabushiki Kaisha
- Keita Sakai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photosensitive resin, resist based on the photosensitive resin, exp...
- Patent number 6,225,019
- Issue date May 1, 2001
- Canon Kabushiki Kaisha
- Minoru Matsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing semiconductor devices by performing coating...
- Patent number 6,087,076
- Issue date Jul 11, 2000
- Canon Kabushiki Kaisha
- Keita Sakai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Diffractive optical element and optical instrument having the same
- Patent number 6,008,942
- Issue date Dec 28, 1999
- Canon Kabushiki Kaisha
- Makoto Ogusu
- G02 - OPTICS
Information Patent Grant
Resist solution for photolithography including a base resin and an...
- Patent number 5,952,149
- Issue date Sep 14, 1999
- Canon Kabushiki Kaisha
- Keita Sakai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MOLDING APPARATUS, METHOD OF MOLDING, AND METHOD OF PLANARIZATION
- Publication number 20220317566
- Publication date Oct 6, 2022
- Canon Kabushiki Kaisha
- Masayuki Tanabe
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS AND METHOD OF CONTROLLING IMPRINT APPARATUS
- Publication number 20210069960
- Publication date Mar 11, 2021
- Canon Kabushiki Kaisha
- Hisashi Namba
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
EJECTION APPARATUS AND IMPRINT APPARATUS
- Publication number 20200376851
- Publication date Dec 3, 2020
- Canon Kabushiki Kaisha
- Masahiro Kuri
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
METHOD FOR FORMING A PATTERNED FILM, METHOD FOR MANUFACTURING OPTIC...
- Publication number 20160219717
- Publication date Jul 28, 2016
- Canon Kabushiki Kaisha
- Toshiki Ito
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR DETERMINING PATTERN OF MOLD FOR IMPRINT, IMPRINT METHOD,...
- Publication number 20150123300
- Publication date May 7, 2015
- Canon Kabushiki Kaisha
- Masayuki Tanabe
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT METHOD AND IMPRINT APPARATUS
- Publication number 20140327183
- Publication date Nov 6, 2014
- Sunao Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING A DEVICE
- Publication number 20120170007
- Publication date Jul 5, 2012
- Canon Kabushiki Kaisha
- Keita Sakai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR EXPOSURE AND METHOD OF MANUFACTURING DEVICE
- Publication number 20090273766
- Publication date Nov 5, 2009
- Canon Kabushiki Kaisha
- Keita Sakai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20090225291
- Publication date Sep 10, 2009
- Canon Kabushiki Kaisha
- Sunao Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method Of Manufacturing A Calcium Fluoride Single Crystal
- Publication number 20080229999
- Publication date Sep 25, 2008
- Canon Kabushiki Kaisha
- Keita Sakai
- C30 - CRYSTAL GROWTH
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20080002169
- Publication date Jan 3, 2008
- Canon Kabushiki Kaisha
- Noriyasu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION EXPOSURE APPARATUS
- Publication number 20070291241
- Publication date Dec 20, 2007
- Canon Kabushiki Kaisha
- Keita Sakai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND EXPOSURE SYSTEM
- Publication number 20070188725
- Publication date Aug 16, 2007
- Keita SAKAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Single crystal calcium fluoride for photolithography
- Publication number 20060260535
- Publication date Nov 23, 2006
- Canon Kabushiki Kaisha
- Keita Sakai
- C30 - CRYSTAL GROWTH
Information Patent Application
Calcium fluoride and its manufacture method
- Publication number 20040050318
- Publication date Mar 18, 2004
- Canon Kabushiki Kaisha
- Keita Sakai
- C30 - CRYSTAL GROWTH

Keita SAKAI

Person

Patents Grantslast 30 patents

Imprint apparatus and method of controlling imprint apparatus

Ejection apparatus and imprint apparatus

Method for determining pattern of mold for imprint, imprint method,...

Exposure apparatus, and method of manufacturing a device

Method of manufacturing a calcium fluoride single crystal

Exposure apparatus, exposure method, and exposure system

Immersion exposure apparatus

Exposure apparatus and device manufacturing method

Method of manufacturing single crystal calcium fluoride

Photosensitive resin, resist composition using the photosensitive r...

Patterning method, and method for manufacturing semiconductor device

Photosensitive resin, resist based on the photosensitive resin, exp...

Method of manufacturing semiconductor devices by performing coating...

Diffractive optical element and optical instrument having the same

Resist solution for photolithography including a base resin and an...

Patents Applicationslast 30 patents

MOLDING APPARATUS, METHOD OF MOLDING, AND METHOD OF PLANARIZATION

IMPRINT APPARATUS AND METHOD OF CONTROLLING IMPRINT APPARATUS

EJECTION APPARATUS AND IMPRINT APPARATUS

METHOD FOR FORMING A PATTERNED FILM, METHOD FOR MANUFACTURING OPTIC...

METHOD FOR DETERMINING PATTERN OF MOLD FOR IMPRINT, IMPRINT METHOD,...

IMPRINT METHOD AND IMPRINT APPARATUS

EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING A DEVICE

APPARATUS AND METHOD FOR EXPOSURE AND METHOD OF MANUFACTURING DEVICE

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

Method Of Manufacturing A Calcium Fluoride Single Crystal

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

IMMERSION EXPOSURE APPARATUS

EXPOSURE APPARATUS, EXPOSURE METHOD, AND EXPOSURE SYSTEM

Single crystal calcium fluoride for photolithography

Calcium fluoride and its manufacture method